| Basic specifications |
| Measurement modes |
LCR mode, Continuous measurement mode |
| Measurement parameters |
Z, Y, θ, X, G, B, Q, Rdc (DC resistance), Rs (ESR), Rp, Ls, Lp, Cs, Cp, D (tanδ), σ, ε |
| Measurement range |
100 mΩ to 100 MΩ, 10 ranges (All parameters are determined according to Z) |
| Display range |
Z: 0.00 m to 9.99999 GΩ, Rs, Rp, Rdc, X: ±(0.00 m to 9.99999 GΩ)
G, B: ±(0.000 n to 9.99999 GS), Ls, Lp: ±(0.00000 μ to 9.99999 GH),
Cs, Cp: ±(0.0000 p to 9.99999 GF), Y: 0.000 n to 9.99999 GS,
θ : ±(0.000° to 999.999°), Q: ±(0.00 to 9999.99),
D : ±(0.00000 to 9.99999), Δ % : ±(0.000 % to 999.999%) |
| Basic accuracy |
Z ±0.05% rdg. θ: ±0.03° (represestative value, Measurable range: 1 mΩ to 200 MΩ) |
| Measurement frequency |
4 Hz to 8 MHz (10 mHz to 100 Hz steps) |
| Measurement signal level |
[Normal mode: V mode/CV mode]
4 Hz to 1.0000 MHz: 10 mV to 5 V (maximum 50 mA)
1.0001 MHz to 8 MHz: 10 mV to 1 V (maximum 10mA)
[Low impedance high accuracy mode: V mode/CV mode]
4 Hz to 1.0000 MHz: 10 mV to 1 V (maximum 100 mA)
[Normal mode: CC mode]
4 Hz to 1.0000 MHz: 10 μA to 50 mA (maximum 5 V)
1.0001 MHz to 8 MHz: 10 μA to 10 mA (maximum 1 V)
[Low impedance high accuracy mode: CC mode]
4 Hz to 1.0000 MHz: 10 μA to 100 mA (maximum 1 V)
DC resistance measurement]
Measurement signal level: Fixed at 1 V |
| DC bias measurement |
Generating range: DC voltage 0 V to 2.50 V (10mV resolution)
In low Z high accuracy mode: 0 V to 1 V (10 mV resolution) |
| Output impedance |
Normal mode: 100 Ω, Low impedance high accuracy mode: 10 Ω |
| Display |
5.7-inch color TFT with touch panel |
| Functions |
Comparator, BIN measurement (10 categories for 2 measurement parameters), Trigger
function, Open/short compensation, Contact check, Panel loading/saving, Memory
function |
| Interfaces |
EXT. I/O( HANDLER) ,USB, USB flash drive, LAN, GP-IB, RS-232C, BCD |
| Power supply |
100 to 240 V AC, 50/60 Hz, 50 VA max. |
| Dimensions and mass |
330 mm (12.99 in) W × 119 mm (4.69 in) H × 230 mm (9.06 in) D, 4.2 kg (148.1 oz) |
| Accessories |
Power cord ×1, Instruction manual ×1, LCR application disc (Communications user
manual) ×1 |
| Electrical specifications |
| Input type |
Optocoupler-isolated, non-voltage contact inputs (current sink, active-low) |
| Input asserted (on) voltage |
0.9 V or less |
| Input de-asserted (off) voltage |
OPEN or 5 V to 24 V |
| Input asserted (on) current |
3 mA/ch |
| Maximum applied voltage |
30 V |
| Output type |
Isolated NPN open-collector outputs (current sink, active-low) |
| Maximum load voltage |
30V |
| Maximum output current |
50 mA/ch |
| Residual voltage |
1 V (10 mA), 1.5 V (50 mA) |
| Output voltage |
4.5 V to 5.0 V |
| Maximum output current |
100 mA |
| External power input |
none |
| Measurement parameters and measurement conditions |
Measurement
parameters |
Z Impedance
Y Admittance
θ Phase angle
X Reactance
G Conductance
B Susceptance
Q Q-factor
Rdc DC resistance
Rs Equivalent series resistance (ESR)
Rp Equivalent parallel resistance
Ls Equivalent series inductance
Lp Equivalent parallel inductance
Cs Equivalent series capacitance
Cp Equivalent parallel capacitance
D Loss factor tan δ
σ Conductivity
ε Permittivity |
| Display range |
Z 0.00 m to 9.99999 GΩ
Y 0.000 n to 9.99999 GS
θ ±(0.000° to 999.999°)
X ±(0.00 m to 9.99999 GΩ)
G ±(0.000 n to 9.99999 GS)
B ±(0.000 n to 9.99999 GS)
Q ±(0.00 to 9999.99)
Rdc ±(0.00 m to 9.99999 GΩ
Rs ±(0.00 m to 9.99999 GΩ)
Rp ±(0.00 m to 9.99999 GΩ)
Ls ±(0.00000 μ to 9.99999 GH)
Lp ±(0.00000 μ to 9.99999 GH)
Cs ±(0.0000 p to 9.99999 GF)
Cp ±(0.0000 p to 9.99999 GF)
D ±(0.00000 to 9.99999)
Δ% ±(0.000% to 999.999%)
σ ±(0.00000 to 999.999 G)
ε ±(0.00000 to 999.999 G) |
| Measurable range |
1 mΩ to 200 MΩ |
| Output impedance |
Normal mode: 100 Ω, Low impedance high accuracy mode: 10Ω |
| Range |
4 Hz to 8 MHz |
| Resolution |
4.00 Hz to 999.99 Hz …………… 10 mHz steps
.0000 kHz to 9.9999 kHz …… 100 mHz steps
10.000 kHz to 99.999 kHz …… 1 Hz steps
100.00 kHz to 999.99 kHz …… 10 Hz steps
1.0000 MHz to 8.0000 MHz …… 100 Hz steps |
| Accuracy |
±0.01% of setting or less |
| Range |
[Normal mode]
4 Hz to 1.0000 MHz: 10 mV to 5 V (maximum 50 mA)
1.0001 MHz to 8 MHz: 10 mV to 1 V (maximum 10mA)
[Low impedance high accuracy mode]
4 Hz to 1.0000 MHz: 10 mV to 1 V (maximum 100 mA) |
| Resolution |
10 mV to 1.000 V …… 1 mV steps |
| Range |
[Normal mode]
4 Hz to 1.0000 MHz: 10 μA to 50 mA (maximum 5 V)
1.0001 MHz to 8 MHz: 10 μA to 1 mA (maximum 1 V)
[Low impedance high accuracy mode]
4 Hz to 1.0000 MHz: 10 μA to 100 mA (maximum 1 V) |
| Resolution |
10 μA steps |
| Monitor function |
Monitor voltage range: 0.000 V to 5.000 V
Monitor current range: 0.000 mA to 100.0 mA |
DC resistance
measurement |
Measurement signal level: Fixed at 1 V |
| DC bias measurement |
Generating range: DC voltage 0 V to 2.50 V (10mV resolution)
In low Z high accuracy mode: 0 V to 1 V (10 mV resolution) |
| Measurement modes |
| Measurement modes |
LCR mode: Measurement using a single set of conditions.
Continuous measurement mode: Continuous measurement
using previously saved conditions |
| LCR mode |
| Measurements |
Bin measurement: 10 categories for 2 measurement parameters
Judgment method: Set as absolute values, percentage, or
deviation percentage |
Comparator measurement: Hi, IN, and Lo judgments for
2 parameters
Judgment method: Set as absolute values, percentage, or de-
viation percentage |
| Display |
Zoom display function: Enlarged display of measured values
Number of display digits setting: Allows you to set the number
of display digits for measured values for each measurement
parameter. (Valid setting range: 3 to 6 digits) |
| Continuous measurement mode |
| Measurements |
Performs continuous measurement using measurement condi-
tions that have been saved using the panel save function.
Measurement is started by an external trigger (any of the three
types described below) |
Maximum number
of measurements |
60 |
| Speed and accuracy |
| Measurement speed |
FAST/MED/SLOW/SLOW2 |
| Averaging |
Valid setting range: 1 to 256 (in steps of 1) |
| Basic accuracy |
Z: 0.05% rdg. θ: 0.03° (representative value) |
Guaranteed
accuracy range |
1 mΩ to 200 MΩ (impedance) |
Guaranteed
accuracy period |
1 year |
| Warm-up time |
60 minutes |
| Terminal structure |
4-terminal structure |
| Supplementary functionality |
| Trigger function |
Uses a specific signal to time the start of measurement.
[Trigger types]
Internal trigger: Automatically generates a trigger signal
internally to repeat measurement.
External trigger: Allows you to control the instrument
,
s
measurement operation by inputting a trigger signal from
an external device (trigger sources: manual, communica-
tions commands, EXT. I/O).
[Trigger delay]
Sets the delay time from trigger input to measurement.
Setting range: 0.0000 s to 9.9999 s
[Trigger synchronous output]
Outputs the measurement signal after trigger input and ap-
plies it to the sample during measurement only.
Allows you to set a wait time until data is acquired.
Setting range: 0.0000 s to 9.9999 s |
Compensation
function |
[Open/short compensation]
[Load compensation] Number of sets of compensation condi-
tions: Up to 5
[Cable length compensation] Cable length settings: 0 m, 1 m,
2 m, 4 m
[Correlation compensation] Compensation of display
values based on user-input compensation coefficient |
| Contact check |
[4-terminal contact check]
Performs a contact (disconnection) check between H CUR and
H POT and between L CUR and L POT.
[High-Z reject function]
Detection of OPEN state during 2-terminal measurement. |
| Recording and interface |
| Memory function |
Measurement result items (maximum 32000 items) can
be saved to the instrument.
Memory can be read using communications commands
or a USB flash drive. |
Panel save and load
functions |
Measurement conditions: Up to 60
Compensation values: Up to 128 |
| Interfaces |
EXT. I/O( HANDLER) ,USB, USB flash drive, LAN,
GP-IB, RS-232C |
| BCD output |
[Output from EXT. I/O connector]
Generates BCD output for the No.1 and No.3 parameter
measured values.
*Input and output signals are set to BCD mode (selection
with judgment output). |
| Display and sound |
| Key lock function |
Lock operation of the instrument using the touch screen.
Unlock by entering a passcode. |
| Display settings |
LCD display on/off
Off: The display turns off 10 sec. after the touch panel is
last touched. |
| Display |
5.7-inch color TFT with touch panel |
| Beep tone |
Enable or disable for judgment results and key operation. |
| Other |
Operating
temperature and
humidity |
0°C to 40°C (32°F to 104°F), 80% RH, non-condensing |
Storage
temperature and
humidity |
-10°C to 50°C (14°F to 122°F), 80% RH, non-condensing |
Operating
environment |
Indoors, Pollution Degree 2, altitude up to 2000 m (6562-ft.) |
Power supply and
maximum rated
power |
100 V AC to 240 V AC (50/60 Hz), 50 VA |
| Dielectric strength |
1.62 kV AC for 1 min. between power line and ground line |
| Standards compliance |
EMC: EN 61326, EN 61000
Safety: EN 61010 |
| Dimensions and Mass |
Approx. 330 W × 119 H × 230 D mm (12.99 W × 4.69
H × 9.06 D in) , approx. 4.2 kg (148.1 oz.) |
| Accessories |
Power cord ×1, Instruction manual ×1,
LCR application disc (Communications user manual) ×1 |